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STANDARD FOR THE PROTECTION OF SEMICONDUCTOR FABRICATION FACILITIES
NFPA 318 2022 Edition
| contributor author | NFPA - (NFPA) - National Fluid Power Association | |
| date accessioned | 2022-08-27T23:41:24Z | |
| date available | 2022-08-27T23:41:24Z | |
| date copyright | 2022/01 | |
| date issued | 2022 | |
| identifier other | NFPA 318-2022.pdf | |
| identifier uri | http://yse.yabesh.ir/std;jsessionid=1614F24757D89452A78254F0921A6C2F/handle/yse/312886 | |
| description abstract | This standard applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled and containing what is herein defined as a cleanroom or clean zone, or both. | |
| language | english | |
| title | STANDARD FOR THE PROTECTION OF SEMICONDUCTOR FABRICATION FACILITIES | en |
| title | NFPA 318 2022 Edition | num |
| type | standard | |
| page | 41 | |
| status | active | |
| tree | NFPA - (NFPA) - National Fluid Power Association:;2022 | |
| contenttype | fulltext |
