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BS ISO 19383 Atomic layer deposition - Chemical characteristics and related process specifications of atomic layer deposition precursors

BS ISO 19383

contributor authorBSI - British Standards Institution
date accessioned2025-09-30T21:46:00Z
date available2025-09-30T21:46:00Z
date copyright01 May 2025
date issued2025
identifier isbn-
identifier other000000000030495190.pdf
identifier urihttp://yse.yabesh.ir/std;quein=autho9279AF67081DAC4/handle/yse/346676
languageEnglish
publisherBSI - British Standards Institution
titleBS ISO 19383 Atomic layer deposition - Chemical characteristics and related process specifications of atomic layer deposition precursorsen
titleBS ISO 19383num
typeStandard
page21
statusCurrent
treeBSI - British Standards Institution:;2025
contenttypeFulltext


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