JEDEC JESD221

Alpha Radiation Measurement in Electronic Materials

contributor author	JEDEC - Solid State Technology Association
date accessioned	2017-09-04T15:19:35Z
date available	2017-09-04T15:19:35Z
date copyright	05/01/2011
date issued	2011
identifier other	MTUGKEAAAAAAAAAA.pdf
identifier uri	http://yse.yabesh.ir/std;query=autho1826AF679D/handle/yse/19429
description abstract	This standard applies generally to gas proportional instruments and the use thereof in measuring materials with an alpha emissivity of less than 10 ·khr^-1·cm^-2. The primary focus will be on materials used in semiconductor fabrication. The purpose of this document is to specify the recommended method for measuring alpha emissivity in materials utilized in the manufacturing of semiconductors. The method specifically applies to gas proportional instruments and designates recommended instrument settings. In addition, the method discusses operation of ionization counters. The document also recommends methods for determining sample size and for evaluating instrument background accurately. Treatment of data is also outlined, including identification and elimination of systematic errors. The calculation of results and detection limits is detailed with examples in the annexes. A standard format for reporting results is specified.
language	English
title	JEDEC JESD221	num
title	Alpha Radiation Measurement in Electronic Materials	en
type	standard
page	32
status	Active
tree	JEDEC - Solid State Technology Association:;2011
contenttype	fulltext