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Surface chemical analysis - X-ray photoelectron spectroscopy - Reporting of results of thin-film analysis - First Edition

contributor authorISO - International Organization for Standardization
date accessioned2017-09-04T18:44:07Z
date available2017-09-04T18:44:07Z
date copyright2013.10.01
date issued2013
identifier otherKDQIGFAAAAAAAAAA.pdf
identifier urihttp://yse.yabesh.ir/std;query=autho47037DAVY%20-%206159DD6E273C9FCD0Facili/handle/yse/225475
description abstractThis International Standard specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.
languageEnglish
titleISO 13424num
titleSurface chemical analysis - X-ray photoelectron spectroscopy - Reporting of results of thin-film analysis - First Editionen
typestandard
page54
statusActive
treeISO - International Organization for Standardization:;2013
contenttypefulltext


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