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English -- Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration (ISO 14644-2:2015);
German -- Reinraeume und zugehoerige Reinraumbereiche - Teil 2: Ueberwachung zum Nachweis der Reinraumleistung bezueglich Luftreinheit anhand der Partikelkonzentration (ISO 14644-2:2015)

contributor authorDIN - Deutsches Institut fš?r Normung e. V.
date accessioned2017-10-18T11:11:19Z
date available2017-10-18T11:11:19Z
date copyright2016.05.01
date issued2016
identifier otherYWMMQFAAAAAAAAAA.pdf
identifier urihttp://yse.yabesh.ir/std;quess=autho1216AF679DDCAC4/handle/yse/236179
description abstractScope: This part of ISO 14644 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration. This part of ISO 14644 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 μm to 5 μm. Concentrations of ultrafine particles (particles smaller than 0,1μm) will be addressed in a separate standard
languageEnglish
titleDIN EN ISO 14644-2num
titleEnglish -- Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration (ISO 14644-2:2015)en
titleGerman -- Reinraeume und zugehoerige Reinraumbereiche - Teil 2: Ueberwachung zum Nachweis der Reinraumleistung bezueglich Luftreinheit anhand der Partikelkonzentration (ISO 14644-2:2015)other
typestandard
page21
statusActive
treeDIN - Deutsches Institut fš?r Normung e. V.:;2016
contenttypefulltext


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