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NFPA 318
Standard for the Protection of Semiconductor Fabrication Facilities - Effective Date: 08/21/2017
| contributor author | NFPA - (NFPA) - National Fluid Power Association | |
| date accessioned | 2018-07-31T09:59:04Z | |
| date available | 2018-07-31T09:59:04Z | |
| date copyright | 2018.01.01 | |
| date issued | 2018 | |
| identifier other | WZASBGAAAAAAAAAA.pdf | |
| identifier uri | http://yse.yabesh.ir/std/handle/yse/264986 | |
| description abstract | This standard applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled and containing what is herein defined as a cleanroom or clean zone, or both. Purpose. This standard is intended to provide reasonable safeguards for the protection of facilities containing cleanrooms from fire and related hazards. These safeguards are intended to provide protection against injury, loss of life, and property damage. | |
| language | English | |
| title | NFPA 318 | num |
| title | Standard for the Protection of Semiconductor Fabrication Facilities - Effective Date: 08/21/2017 | en |
| type | standard | |
| page | 40 | |
| status | Active | |
| tree | NFPA - (NFPA) - National Fluid Power Association:;2018 | |
| contenttype | fulltext |
