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ISO 13424
Surface chemical analysis - X-ray photoelectron spectroscopy - Reporting of results of thin-film analysis - First Edition
Organization:
ISO - International Organization for Standardization
Year: 2013
Abstract: This International Standard specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.
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| contributor author | ISO - International Organization for Standardization | |
| date accessioned | 2017-09-04T18:44:07Z | |
| date available | 2017-09-04T18:44:07Z | |
| date copyright | 2013.10.01 | |
| date issued | 2013 | |
| identifier other | KDQIGFAAAAAAAAAA.pdf | |
| identifier uri | http://yse.yabesh.ir/std;query=autho47037DAVY%20-%206159DD6E273C9FCD0Facili/handle/yse/225475 | |
| description abstract | This International Standard specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS. | |
| language | English | |
| title | ISO 13424 | num |
| title | Surface chemical analysis - X-ray photoelectron spectroscopy - Reporting of results of thin-film analysis - First Edition | en |
| type | standard | |
| page | 54 | |
| status | Active | |
| tree | ISO - International Organization for Standardization:;2013 | |
| contenttype | fulltext |