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JEDEC JESD35-1
General Guidelines for Designing Test Structures for the Wafer-Level Testing of Thin Dielectrics - Addendum No. 1 to JESD35
Organization:
JEDEC - Solid State Technology Association
Year: 1995
Abstract: This addendum expands the usefulness of the Standard 35 (JESD35) by detailing the various sources of measurement error that could effect the test results obtained by the ramped tests described in JESD35. Each source of error is described and its implications on test structure design is noted. This addendum can be used as a guide when designing test structures for the qualification and characterization of thin oxide reliability, specifically, by implementing accelerated voltage or current ramp tests.
Subject: Test Structure - Thin Dielectrics
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| contributor author | JEDEC - Solid State Technology Association | |
| date accessioned | 2017-09-04T16:24:21Z | |
| date available | 2017-09-04T16:24:21Z | |
| date copyright | 09/01/1995 | |
| date issued | 1995 | |
| identifier other | TVCLCAAAAAAAAAAA.pdf | |
| identifier uri | http://yse.yabesh.ir/std;quessionid=2A40ear/handle/yse/87715 | |
| description abstract | This addendum expands the usefulness of the Standard 35 (JESD35) by detailing the various sources of measurement error that could effect the test results obtained by the ramped tests described in JESD35. Each source of error is described and its implications on test structure design is noted. This addendum can be used as a guide when designing test structures for the qualification and characterization of thin oxide reliability, specifically, by implementing accelerated voltage or current ramp tests. | |
| language | English | |
| title | JEDEC JESD35-1 | num |
| title | General Guidelines for Designing Test Structures for the Wafer-Level Testing of Thin Dielectrics - Addendum No. 1 to JESD35 | en |
| type | standard | |
| page | 26 | |
| status | Active | |
| tree | JEDEC - Solid State Technology Association:;1995 | |
| contenttype | fulltext | |
| subject keywords | Test Structure - Thin Dielectrics | |
| subject keywords | Thin Dielectrics | |
| subject keywords | Wafer-Level Testing |