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JEDEC JESD35-2
Test Criteria for the Wafer-Level Testing of Thin Dielectrics - Addendum No. 2 to JESD35
Organization:
JEDEC - Solid State Technology Association
Year: 1996
Abstract: This addendum includes test criteria to supplement JESD35. JESD35 describes procedures developed for estimating the overall integrity of thin oxides in the MOS Integrated Circuit manufacturing industry. Two test procedures are included in JESD35: a Voltage-Ramp (V-Ramp) and a Current-Ramp (J-Ramp). As JESD35 became implemented into production facilities on a variety of test structures and oxide attributes, a need arose to clarify end point determination and point out some of the obstacles that could be overcome by careful characterization of the equipment and test structures.
Subject: Test Criteria - Thin Dielectrics
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| contributor author | JEDEC - Solid State Technology Association | |
| date accessioned | 2017-09-04T15:28:45Z | |
| date available | 2017-09-04T15:28:45Z | |
| date copyright | 02/01/1996 | |
| date issued | 1996 | |
| identifier other | NVLNCAAAAAAAAAAA.pdf | |
| identifier uri | http://yse.yabesh.ir/std;quein=autho123393FD081DAC4/handle/yse/29906 | |
| description abstract | This addendum includes test criteria to supplement JESD35. JESD35 describes procedures developed for estimating the overall integrity of thin oxides in the MOS Integrated Circuit manufacturing industry. Two test procedures are included in JESD35: a Voltage-Ramp (V-Ramp) and a Current-Ramp (J-Ramp). As JESD35 became implemented into production facilities on a variety of test structures and oxide attributes, a need arose to clarify end point determination and point out some of the obstacles that could be overcome by careful characterization of the equipment and test structures. | |
| language | English | |
| title | JEDEC JESD35-2 | num |
| title | Test Criteria for the Wafer-Level Testing of Thin Dielectrics - Addendum No. 2 to JESD35 | en |
| type | standard | |
| page | 12 | |
| status | Active | |
| tree | JEDEC - Solid State Technology Association:;1996 | |
| contenttype | fulltext | |
| subject keywords | Test Criteria - Thin Dielectrics | |
| subject keywords | Thin Dielectrics | |
| subject keywords | Wafer-Level Testing |